Fluid circuit with integrated electrostatic discharge mitigation

ABSTRACT

A fluid circuit includes a plurality of tubing segments and a plurality of operative components. Each tubing segment includes i) a non-conductive polymer portion defining a fluid passageway and ii) one or more interior conductive fluoropolymer stripes extending axially to the ends of each of the respective tubing segments. Each operative component includes a conductive fluoropolymer that extends between a plurality of tubing connector fittings forming a part of the fluid circuit, wherein each of the tubing connector fittings conductively connect the respective conductor of the operative component to the interior conductive fluoropolymer stripes of the tubing segment to provide a path to ground that extends through each operative component and each tubing segment.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.16/287,847 filed Feb. 27, 2019, which claims the benefit under 35 USC119 of U.S. Provisional Patent Application No. 62/667,783, filed May 7,2018, the disclosures of which are hereby incorporated herein byreference in their entirety for all purposes.

TECHNICAL FIELD

Embodiments of the present disclosure are directed to fluid handlingsystems, and more specifically, to ultra-pure fluid handling systemswith electrostatic discharge mitigation.

BACKGROUND

Fluid handling systems offering high purity standards have many uses inadvanced technology applications. These applications include processingand manufacturing of solar panels, flat panel displays, and in thesemiconductor industry for applications such as photolithography, bulkchemical delivery, chemical mechanical polishing (CMP), wet etch, andcleaning. Certain chemicals used in these applications are particularlycorrosive, precluding the use of some conventional fluid handlingtechnology because of possible corrosion of the fluid handlingcomponents and leaching of chemicals into the environment.

In order to meet the corrosion resistance and purity requirements forsuch applications, fluid handling systems provide tubing, fittings,valves, and other elements, that are made from inert polymers. Theseinert polymers may include, but are not limited to, fluoropolymers suchas tetrafluoroethylene polymer (PTFE), perfluoroalkoxy alkane polymer(PFA), ethylene and tetrafluoroethylene polymer (ETFE), ethylene,tetrafluoroethylene and hexafluoropropylene polymer (EFEP), andfluorinated ethylene propylene polymer (FEP). In addition to providing anon-corrosive and inert construction, many fluoropolymers, such as PFA,are injection moldable and extrudable. Several types of connectorfittings, made from such polymers, are available and are known, such asPRIMELOCK® fittings, PILLAR® fittings, flared fittings, and otherfittings. Exemplary fittings, for example, are illustrated in U.S. Pat.Nos. 5,154,453; 6,409,222; 6,412,832; 6,601,879; 6,758,104; and6,776,440.

Electrostatic discharge (ESD) is an important technical issue for fluidhandling systems in the semiconductor industry and in other technologyapplications. Frictional contact between fluids and surfaces of variousoperational components (e.g. tubing or piping, valves, fittings,filters, etc.) in the fluid system can result in generation and buildupof static electrical charges. The extent of charge generation depends onvarious factors including, but not limited to, the nature of thecomponents and the fluid, fluid velocity, fluid viscosity, electricalconductivity of the fluid, pathways to ground, turbulence and shear inliquids, presence of air in the fluid, and surface area. Theseproperties, and ways to mitigate the undesired static electrical chargecaused by these properties, are discussed and reported in NFPA 77,“Recommended Practice on Static Electricity”, pp. 77-1 to 77-67, 2014.

Further, as the fluid flows through the system, the charge can becarried downstream in a phenomenon called a streaming charge, wherecharge may buildup beyond where the charge originated. Sufficient chargeaccumulations can cause ESD at the tubing or pipe walls, componentsurfaces, or even onto substrates or wafers at various process steps.

In some applications, semiconductor substrates or wafers are highlysensitive to static electrical charges and such ESD can result in damageor destruction of the substrate or wafer. For example, circuits on thesubstrate can be destroyed and photoactive compounds can be activatedprior to regular exposure due to uncontrolled ESD. Additionally, builtup static charge can discharge from within the fluid handling system tothe exterior environment, potentially damaging components in the fluidhandling system (e.g. tubing or piping, fittings, components,containers, filters, etc.), that may lead to leaks, spills of fluid inthe system, and diminished performance of components. In thesesituations, such discharge, may lead to potential fire or explosion whenflammable, toxic and/or corrosive fluids are used in the compromisedfluid handling system.

In some fluid handling systems, to reduce the buildup of static charges,certain metal or conductive components in fluid handling system aregrounded to mitigate the buildup of static charge in the system as itcontinually disperses from the metal or conductive components to ground.Conventional use of multiple grounding straps may lead to unduemechanical clutter in a fluid handling system, and may lead to a complexgrounding system network requiring extensive maintenance or a complexsystem that may lead to undesirable failure.

It would be desirable to improve ESD mitigation in ultra-pure fluidhandling systems for improved component performance and reduction inpotentially damaging ESD events.

SUMMARY

One or more embodiments of this disclosure are related to a fluidcircuit in a fluid handling system with ESD mitigation. In one or moreembodiments, the fluid circuit includes a plurality of conductiveoperative components and tubing segments.

In certain embodiments, a fluid circuit for a predetermined fluid flowpassageway (such as gases or liquids, or both) having at least one inletand at least one outlet, the fluid circuit comprises a plurality oftubing segments and a plurality of operative components, each operativecomponent comprising a body portion with an internal fluid flowpassageway and a plurality of tubing connector fittings, the operativecomponents connecting the plurality of tubing segments at selectedtubing connector fittings, the plurality of tubing segments andoperative components providing the fluid flow passageway through thefluid circuit; wherein each tubing segment comprises i) a non-conductivepolymer portion defining the fluid passageway and ii) one or moreinterior conductive fluoropolymer stripes extending axially to ends ofeach of the respective tubing segments, wherein each operative componentbody portion comprises a conductive fluoropolymer that extends betweeneach of the plurality of tubing connector fittings, and wherein each ofthe tubing connector fittings conductively connect the respectiveconductor of the body portion to the interior conductive fluoropolymerstripes of the tubing segment.

Other disclosed embodiments are methods of making an electrostaticdischarge mitigation fluid circuit for a predetermined fluid flowpassageway having at least one inlet and at least one outlet comprisingconductively connecting a plurality of tubing segments to a plurality ofoperative components, each operative component comprising a body portionwith an internal fluid flow passageway and a plurality of tubingconnector fittings, the operative components connecting the plurality oftubing segments at selected tubing connector fittings, the plurality oftubing segments and operative components providing the fluid flowpassageway through the fluid circuit; wherein each tubing segmentcomprises i) a non-conductive polymer portion defining the fluidpassageway and ii) an one or more interior conductive stripes ofconductive fluoropolymer that is bonded to and uniform with thenon-conductive polymer portion extending axially to ends of each of therespective tubing segments, wherein each body portion comprises anconductive fluoropolymer that extends between each of the plurality oftubing connector fittings, and wherein each of the tubing connectorfittings conductively connects the respective conductor of the bodyportion to the at least one interior conductive fluoropolymer stripe ofthe tubing segment, and connecting the electrostatic dischargemitigation fluid circuit to ground.

In various embodiments, to provide a conductive pathway and fluidpassageway through the fluid circuit, the operative components areconnected by one or more tubing segments that connect to the componentsat their respective tubing connector fittings. Suitable operativecomponents include, for example, valves, straight connectors,T-connectors, elbow connectors, multi-connector manifolds, filters, heatexchangers, or sensors. Suitable sensors may include, for example, flowcontrollers, regulators, flow meters, pressure meters, or variable areameters. In one or more embodiments, the body portion of the operativecomponents may be bonded to and uniform with a conductive portionextending between the connector fittings and the fluid flow passageway.

In certain embodiments, the plurality of tubing segments each include anon-conductive polymer portion and one or more interior conductivefluoropolymer stripes extending axially with the non-conductive polymertubing portion. The stripes of conductive fluoropolymer of the tubingsegment conductively connect to the conductive pathway of the bodyportion at the tubing connector fittings.

In one or more embodiments, each of the tubing connector fittingsconductively connects the conductive pathway of the body portion to thestripes of conductive fluoropolymer of the tubing portion connected tothe respective tubing connector fitting.

The above summary is not intended to describe each illustratedembodiment or every implementation of the present disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

The drawings included in this disclosure illustrate embodiments of thepresent disclosure and, along with the description, serve to explain theprinciples of the disclosure. The drawings are only illustrative ofcertain embodiments and do not limit the disclosure.

FIG. 1 depicts a fluid handling system and fluid circuit, according toone or more embodiments of this disclosure.

FIG. 2 depicts an operative component and connected tubing segments,according to one or more embodiments of this disclosure.

FIG. 3 depicts an operative component, a tubing connector fitting andfitting nut and tubing segment, according to one or more embodiments ofthis disclosure.

FIGS. 4a and 4b depict side and partial cross sectional views of anoperative component having a tubing connector fitting (FIG. 4a ) and atubing segment (FIG. 4b ), according to one or more embodiments of thisdisclosure.

FIG. 5a depicts a cross-sectional view of an operative component,according to one or more embodiments of this disclosure.

FIG. 5b depicts a cross-sectional view taken at section line 5-1 of FIG.5 a.

FIG. 5c depicts a cross-sectional view of an alternative embodimenttaken at section line 5-1 of FIG. 5 a.

FIGS. 5d and 5e depict cross-sectional views of alternative embodimentstaken at section line 5-1 of FIG. 5 a.

FIG. 6a depicts an exploded isometric view of a filter having two endcaps, according to one or more embodiments of this disclosure.

FIG. 6b depicts an isometric view of a filter having two end caps,according to one or more embodiments of this disclosure.

FIG. 7a depicts an exploded isometric view of a filter having one endcap, according to one or more embodiments of this disclosure.

FIG. 7b depicts an isometric view of one end cap, according to one ormore embodiments of this disclosure.

FIGS. 8a-8d depict isometric views of alternative embodiments of tubingsegments of this disclosure.

FIG. 9 depicts a digital image of a tubing segment of this disclosure.

FIG. 10 depicts an extrusion system of this disclosure.

FIG. 11 depicts a Faraday Cup apparatus used to test to ability ofdifferent tubing segments to generate static electrical charge.

FIGS. 12-13 graphically illustrate the difference in static chargegeneration between a PFA tubing segment and a stainless steel (SS)tubing segment having the same diameter under the same flow conditions.

FIGS. 14-15 graphically illustrate the difference in static chargegeneration between a PFA/inner and outer diameter stripes tubing segmentand a PFA/inner diameter stripes tubing segment having the same diameterunder the same flow conditions.

FIG. 16 graphically displays the measured amount of static electricitygenerated by various tubing segments tested in Example.

The embodiments of this disclosure are amenable to various modificationsand alternative forms, and certain specifics have been shown, forexample, in the drawings and will be described in detail. It isunderstood that the intention is not to limit the disclosure to theparticular embodiments described; the intention is to cover allmodifications, equivalents, and alternatives falling within the spiritand scope of this disclosure.

DETAILED DESCRIPTION

This disclosure reports embodiments of a fluid handling system with ESDmitigation having a fluid flow passageway from a fluid supply to one ormore downstream process stages. Embodiments of this system include afluid circuit including conductively connected operative components andtubing segments. Conventional and some ESD mitigation fluid circuits arereported, for example, in International patent application, WO2017/210293, which is incorporated herein by reference, except forexpress definitions or patent claims contained therein. Other ESDmitigation fluid circuits are reported, for example, in an Entegrisbrochure, FLUOROLINE Electrostatic (ESD) Tubing, 2015-2017.

Operative components in this disclosure refer to any component or devicehaving a fluid input and a fluid output and that connect with tubing fordirecting or providing for the flow of fluid. Examples of operativecomponents include, but are not limited to, fittings, valves, filters,heat exchanges, sensors, pumps, mixers, spray nozzles, and dispenseheads. These and additional non-limiting examples of operativecomponents are illustrated, for example, in U.S. Pat. Nos. 5,672,832;5,678,435; 5,869,766; 6,412,832; 6,601,879; 6,595,240; 6,612,175;6,652,008; 6,758,104; 6,789,781; 7,063,304; 7,308,932; 7,383,967;8,561,855; 8,689,817; and 8,726,935, each of which are incorporatedherein by reference, except for express definitions or patent claimscontained in the listed documents.

The operative components may be constructed from conductivefluoropolymers including, for example, perfluoroalkoxy alkane polymer(PFA), ethylene and tetrafluoroethylene polymer (ETFE), ethylene,tetrafluoroethylene and hexafluoropropylene polymer (EFEP), fluorinatedethylene propylene polymer (FEP), tetrafluoroethylene p[polymer PTFE),or other suitable polymeric materials. For example, in some embodimentsthe conductive fluoropolymers are PFA loaded with conductive material(e.g. loaded PFA). This loaded PFA includes, but is not limited to, PFAloaded with carbon fiber, nickel coated graphite, carbon fiber, carbonpowder, carbon nanotubes, metal particles, and steel fiber. In variousembodiments, conductive materials have a surface resistivity level lessthan about 1×10⁸ ohms per square while non-conductive materials have asurface resistivity level greater than about 1×10¹⁰ ohms per square. Incertain embodiments, conductive materials have a surface resistivitylevel less than about 1×10⁹ ohms per square while non-conductivematerials have a surface resistivity level greater than about 1×10⁹ ohmsper square. When the disclosed fluid handling systems are configured foruse in ultra-pure fluid handling applications, both the tubing segmentsand operational components are typically constructed from polymericmaterials to satisfy purity and corrosion resistance standards.

Tubing segments in this disclosure typically refer to any flexible orinflexible pipe or tube that is suitable for containing or transportingfluid. Tubing segments are conductive, providing a conductive pathwayalong the length of each tubing segment in the fluid circuit. Conductivetubing may be constructed from materials including metal or loadedpolymeric material. Loaded polymeric material includes a polymer that isloaded with steel wire, aluminum flakes, nickel coated graphite, carbonfiber, carbon powder, carbon nanotubes, or other conductive material. Insome instances, the tubing segments are partially conductive, having amain portion constructed from non-conductive or low conductive material,such as constructed from various hydrocarbon and non-hydrocarbonpolymers such as, but are not limited to, polyesters, polycarbonates,polyamides, polyimides, polyurethanes, polyolefins, polystyrenes,polyesters, polycarbonates, polyketones, polyureas, polyvinyl resins,polyacrylates, polymethylacrylates and fluoropolymers. Exemplaryfluoropolymers include, but are not limited to, perfluoroalkoxy alkanepolymer (PFA), ethylene tetrafluoroethylene polymer (ETFE), ethylene,tetrafluoroethylene and hexafluoropropylene polymer (EFEP), fluorinatedethylene propylene polymer (FEP), and tetrafluoroethylene polymer(PTFE), or other suitable polymeric materials, and having, for example,a secondary co-extruded conductive portion. In certain embodiments theinterior fluoropolymer conductive stripe of the tubing segments has awidth in the range of about 0.1-1 centimeter. In selected embodimentseach tubing segment has a length in a range of about 1-100 feet. Inother selected embodiments, the tubing segment has an outside diameterof about ⅛ inch to about 2 inches. In other embodiments the tubingsegments have a measured resistance of about 1.2×10⁴-6.7×10⁵ ohm. Instill other embodiments the tubing segments have a measured resistanceof about 2.5-4.3×10⁴ ohm.

FIG. 1 depicts a fluid handling system 150 according to one or moreembodiments of the disclosure. The system 150 provides a flow path forfluid to flow from a fluid supply 152 to one or more process stages 156positioned downstream of the source of fluid supply. System 150 includesa fluid circuit 160 which includes a portion of the flow path of thefluid handling system 150. The fluid circuit 160 includes tubingsegments 164 and a plurality of operative components 168 that areinterconnected via the tubing segments 164. In FIG. 1, the operativecomponents 168 include an elbow shaped fitting 170, T-shaped fitting172, a valve 174, filter 176, flow sensor 178, and straight fitting 179.However, in various embodiments the fluid circuit 160 can includeadditional or fewer operative components 168 in number and in type. Forexample, the fluid circuit 160 could substitute or additionally includepumps, mixers, dispense heads, sprayer nozzles, pressure regulators,flow controllers, or other types of operational components. In assembly,the operative components 168 are connected together by the plurality oftubing segments 164 connecting to the components 168 at their respectivetubing connector fittings 186. Connected together, the plurality oftubing segments 164 and operative components 168 provide a fluidpassageway through the fluid circuit 160 from the fluid supply 152 andtoward the process stages 156. In certain embodiments, the operationalcomponents 168 each include a body portion 182 that defines fluid flowpassageway and one or more tubing connector fittings 186. In someembodiments, at least one of the tubing connector fittings 186 is aninlet portion for receiving fluid into the body portion 182 and at leastanother one of the tubing connector fittings 186 is an outlet portionfor outputting fluid received via the inlet portion. For example,T-shaped fitting 172 includes one tubing connector fitting 186 that isan inlet portion that receives fluid from the fluid supply 152 and twotubing connector fittings 186 which are outlet portions outputting fluidtoward the process stages 156. In certain embodiments, the inlet portionand the outlet portion are each connected or connectable to a tubingsegment 164. However, in some embodiments, for example where theoperative components 168 in the fluid circuit 160 includes a spraynozzle, only the inlet portion is required to be connectable to a tubingsegment 164. In some embodiments one or more of the operative components168 includes a single tubing connector or fitting 179.

As illustrated in FIG. 1, each body portion 182 is additionallyconstructed using a conductive material to form a conductor portion thatextends between and provides a conductive pathway between each of thetubing connector fittings 186. In various embodiments, the conductivepathway is bonded to and uniform with the body portion 182 and isconstructed from a conductive polymeric material. For example, in someembodiments the conductor portion is constructed from PFA loaded withconductive material. This loaded PFA includes, but is not limited to,PFA loaded with carbon fiber, nickel coated graphite, carbon fiber,carbon powder, carbon nanotubes, metal particles, and steel fiber.

As illustrated in FIGS. 2 and 3, tubing segments 164 are partiallyconductive, having a main portion or tubing portion 187 constructed fromnon-conductive or low conductive polymeric material and having asecondary portion or conductive portion 188 (indicated by dashed lines)constructed from a conductive material that extends axially along theinterior length of the tubing portion 187. For example, in someembodiments, tubing segments 164 each include a tubing portion 187 of anon-conductive fluoropolymer and conductive portion 188 formed as astripe of conductive polymer extending axially on and bonded to auniform with the non-conductive fluoropolymer main portion 187. Incertain embodiments, tubing portions are constructed from PFA with theone or more conductive stripes 187 of the secondary portion constructedfrom carbon-loaded PFA that is extruded along the interior length ofeach of the tubing segments 164 at or near its interior surface.

Each of the operative components 168, as illustrated in FIG. 1, includesa bridging component for conductively connecting the respectiveconductive pathway of the body portion 182 to the conductive portion 187of the tubing segments 164 (shown in FIGS. 2 and 3) that are connectedto the operative components 168. As such, in certain embodiments theconnected operative components 168 and tubing segments 164 form anelectrical pathway along the entirety of the fluid circuit 160,eliminating breaks in conductivity between the tubing segments 160. Acircuit diagram 190 is superimposed over the fluid circuit 160 toillustrate the electrical pathway. In various embodiments, conductivematerials have a surface resistivity level less than about 1×10¹⁰ ohmsper square, while non-conductive materials have a surface resistivitylevel greater than about 1×10¹⁰ ohms per square. In certain embodiments,conductive materials have a surface resistivity level less than about1×10⁹ ohms per square, while non-conductive materials have a surfaceresistivity level greater than about 1×10⁹ ohms per square.

In certain embodiments, to mitigate static charge buildup, one or moreof the operative components 168 are electrically connected to ground 194via one or more attachment fixtures 198. The ground attachment fixtures198 continuously disperse static charges as they build up in the fluidcircuit 160 by providing a pathway to ground 194 from the conductivepathway 190.

FIGS. 2 and 3 depict examples of operative components 210 according toone or more embodiments of this disclosure. FIG. 2 depicts an operativecomponent 210 that is a fitting 214, and, more specifically, is a threeway connector having a “T” shape (e.g. a T-shaped fitting). FIG. 3depicts a valve 218. The T-shaped fitting 214 includes a conductive bodyportion 222 and three connector fittings 226 extending outwardly fromthe body portion 222. In certain embodiments the exterior surface of theconnector fittings includes a structure surface 270. The valve 218includes a conductive body portion 230 and two connector fittings 227extending outwardly from the body portion 230. In certain embodimentsthe exterior surface of the connector fittings includes a structuresurface 270.

In various embodiments, connector fittings 226 and 227 are substantiallythe same design. As described above, in various embodiments the bodyportion 222, 230 is constructed using a conductive polymeric material.For example, the body portion 222 or 230 can be constructed fromconductive carbon-loaded fluoropolymers including, but not limited to,PFA, ETFE, FEP, and PTFE.

FIG. 4a illustrates a straight connector fitting 400 to connect twotubing segments. Connector fitting 400 includes a shoulder region 402adjacent a body portion 404 of an operative component and extendsoutwardly to form a neck region 406, a threaded region 406 a, and anipple portion 406 b. Tubing segment 164 is received by the nippleportion 406 b, which, in certain embodiments, may be configured, forexample, as a FLARETEK® fitting. Connector fitting 400 also includes anattachment feature 408 that is a conductive material that isconductively connected with the body portion 504 for attachment to anexternal electrical contact and then to ground. For example, attachmentfeature 408 can be connected to an electrical contact which is groundedin order to configure the operative component connector fitting 400 forESD mitigation.

In the embodiment illustrated in FIG. 4b , connector fitting 400includes a connector fitting nut 410 for engaging to the threaded region406 a to secure tubing segment 164. In some embodiments the fitting nutmay be, for example, a compression nut. As the fitting nut 410 isrotated and tightened onto the threaded region 406 a, tubing segment 164engages the connector fitting so that the interior conductive stripesconductively connected the conductive portion to nipple portion 406 b,as well as forming a leak-proof seal between the tubing and theconnector fitting. In one or more embodiments, fitting nut 410 has agenerally cylindrical shape having an interior surface including threads410 a for mating with threaded region 406 a. In addition, fitting nut410 may have a structured outer surface such as, for example, ribs 270illustrated in FIGS. 2 and 3, where the ribs are symmetrically disposedabout the exterior surface for mating with a wrench or locking devicefor tightening or loosening of the fitting nut 410 on the threadedregion 406 a.

In one or more embodiments, the fitting nut 410 is constructed from apolymeric material. For example, in certain embodiments the fitting nut410 is constructed from PFA, polyaniline, or other suitable polymer.

In some embodiments, the connector fitting 400 is a conductive polymermaterial, such as carbon-loaded PFA, or other suitable conductivepolymer, that is formed, for example, using conventional moldingprocesses.

In certain embodiments, when the connector fitting 400 is assembled withtubing segment 164, the fitting nut 410 contacts the exterior surface oftubing segment 164 at the nipple forward portion 406 b and forms acontinuous fluid passageway between tubing segment 164 and connectorfitting 400. When the fitting nut 410 is rotated and tightened, O-ring412 positioned between the fitting nut 410 and the shoulder portion 402contacts both the exterior surfaces of the fitting nut and shoulderportion to provide a leak-proof connection.

In various embodiments, the O-ring 360 is constructed from polymericmaterial, such as PFA, or other polymers or elastomers.

Those of skill in the art will appreciate that, while the specificembodiments illustrated in FIGS. 2, 3 and 4 have identical connectorfittings, in certain embodiments, the connector fittings may havevarying sizes, may have various designs, such as step-down or step-upfittings, or may be located on various types of operative components210.

FIGS. 5a-5e illustrate several embodiments of an operative component500. Operative component 500 includes a body portion 504, tubingconnector fittings 520, and fitting nuts 508. In one or moreembodiments, the operative component 500 additionally includes anoperative element 506 in the body portion. The operative element 506, invarious embodiments, broadly includes suitable structure, electronics,or other materials for configuring the operative component 500 toperform various operations. For example, in some embodiments, theoperational element 506 is a mixer, sensor, filter, pump, heat exchangeror other suitable element. As such, the operative component 500 isconfigurable to perform various processes or tasks within a fluidcircuit.

The body portion 504 includes conductive PFA that extends between eachof the tubing connector fittings 520 and forms electrical contactbetween each of the tubing connector fittings 520 and the interiorconductive stripes of tubing segments 522 a and 522 b, respectively.Depicted in FIGS. 5b and 5c , in one or more embodiments, the conductiveportions of the tubing segments are narrow interior stripes ofconductive material that is bonded to and uniform with thenon-conductive polymer material of the tubing segments. FIG. 5billustrates a tubing segment with four interior conductive stripes 524a-524 d. In another embodiment, 5 c illustrates a tubing segment witheight interior conductive stripes 524 a-524 h. In still otherembodiments, FIG. 5d illustrates a tubing segment with eight interiorconductive stripes 524 a-524 h, and two exterior conductive stripes 526a and 526 b. In a similarly construction of a tubing segment withinterior and exterior stripes, FIG. 5e illustrates a tubing segment witheight interior conductive stripes 524 a-524 hg, and two exteriorconductive stripes 526 a and 526 b.

As described above, in various embodiments the operative component 500is connected with tubing segments 522 a and 522 b at each of theconnector fittings 508. The connector fittings 508 form an electricalpathway from conductive portions 522 a and 522 b of the tubing segmentsthrough the connector portions 508 and across the body portion 504.

In various embodiments, illustrated in FIG. 5a , the body portion 504includes an attachment feature 528. In one or more embodiments, theattachment feature 528 is a piece of conductive material that isconductively connected with the body portion 504 for attachment to anexternal electrical contact and then to ground. For example, attachmentfeature 528 can be connected to an electrical contact which is groundedin order to configure the operative component 500 for ESD mitigation. Inone or more embodiments, the attachment feature 528 is a connector bosswhich is threaded for attachment to a nut or other threaded connector.In some embodiments, the attachment feature 528 is a tab, a threadedhole, or other suitable feature for connecting to an electrical contact.However, in certain embodiments, the attachment feature 528 can beconfigured for interference fit, snap fit, friction fit, or othermethods of fitting with an electrical contact.

FIG. 6a illustrates one embodiment of an operative component that is afilter. This isomeric view of a filter 600 includes a housing 602, twoconductive end caps 604 and 606, and outer conductive sleeve 608.Housing 602 includes an interior filter element (not shown) that in someembodiments is a replaceable component; while in other embodiments is afixed, non-replaceable component. In various embodiments, housing 602may be a polymeric material and in other embodiments may be a conductivepolymer such as, for example a conductive, carbon-loaded PFA as describeabove. Both conductive end caps 604, 606 may be conductive materialssuch as, for example, conductive, carbon-loaded PFA. Each end cap 604,606 includes fittings for connecting the end caps to housing 602. Insome embodiments the connection may be removable, while in otherembodiments the connection may be fixed or permanent. In addition, eachend cap 604, 606 include one or more connector fittings to connect eachend cap to tubing segments (also not shown), described above, in orderto provide both a connective pathway and a fluid passageway from atubing segment through one end cap and housing to another end cap andtubing segment. In certain embodiments, the connector fitting includes,for example, a nipple portion 610, threaded portion, 612, shoulderportion 614 and fitting nut 616, as described above, to provide aconductive connection as well as a leak-proof passageway from tubingsegments and filter 600. Further, the connector fitting may include anO-Ring (not shown). Conductive sleeve 608 extends over the exteriorsurface of both the housing 602 and conductive end caps 604, 606. Thesleeve 608 is a conductive polymer material such as, for example,carbon-loaded PFA that provides a conductive connection between the endcaps 604, 606. In some embodiments, sleeve 608 is a shrink wrap polymerthat may be placed over the exterior of housing 602 and end caps 604,606 and connected to the exterior surfaces by applying heat to thesleeve using conventional apparatus and process. Optionally, one both ofboth end caps 604, 606 may include an attachment feature (not shown). Inone or more embodiments, the attachment feature is a piece of conductivematerial that is conductively connected with one or both end caps 604,606 for attachment to an external electrical contact and then to ground.For example, attachment feature can be connected to an electricalcontact which is grounded in order to configure the filter for ESDmitigation. In one or more embodiments, the attachment feature is aconnector boss which is threaded for attachment to a nut or otherthreaded connector. In some embodiments, the attachment feature is atab, a threaded hole, or other suitable feature for connecting to anelectrical contact. However, in certain embodiments, the attachmentfeature can be configured for interference fit, snap fit, friction fit,or other method of fitting with an electrical contact.

In certain embodiments as illustrated in FIG. 6b , filter 600 includes adrain fitting 618 and drain plug 620. When the drain fitting 618 and/ordrain plug is a conductive material, one or both of these components maybe connected to ground to provide ESD mitigation.

FIG. 7a also illustrates one embodiment of an operative component thatis a filter. This isomeric view of a filter 700 includes a housing 702,a conductive end cap 704, and outer conductive sleeve 708. Housing 702includes an interior filter element (not shown) that in some embodimentsis a replaceable component; while in other embodiments is a fixed,non-replaceable component. In various embodiments, housing 702 may be apolymeric material and in other embodiments may be a conductive polymersuch as, for example a conductive, carbon-loaded PFA as describe above.Conductive end cap 704 may be a conductive material such as, forexample, conductive, carbon-loaded PFA. Conductive end cap 704 includesfittings for connecting the end cap to housing 702. In some embodimentsthe connection may be removable, while in other embodiments theconnection may be fixed or permanent. In addition, end cap 704 includesone or more connector fittings 710 to connect the end cap to tubingsegments as described above, in order to provide both connective andfluid passageways from a tubing segment through a conductor fittingthrough the housing to another conductor fitting and tubing segment. Incertain embodiments, the connector fittings include, for example, anipple portion, threaded portion, shoulder portion, and fitting nut, asdescribed above, to provide conductive connections as well as aleak-proof fluid passageway from tubing segments 164 and filter 700.Further, the connector fitting may include an O ring (not shown).Conductive sleeve 708 extends over the exterior surface of both thehousing 702 and conductive end cap 704. The sleeve 708 is a conductivepolymer material such as, for example, carbon-loaded PFA that provides aconductive connection between the end cap 704 and the exterior of filter700. In some embodiments, sleeve 708 is a shrink wrap polymer that maybe placed over the exterior of housing 702 and end cap 704 and connectedto the exterior surfaces by applying heat to the sleeve usingconventional apparatus and process. Optionally, end cap 704 may includean attachment feature (not shown). In one or more embodiments, theattachment feature is a piece of conductive material that isconductively connected with end cap 704 for attachment to an externalelectrical contact and then to ground. For example, attachment featurecan be connected to an electrical contact which is grounded in order toconfigure the filter for ESD mitigation. In one or more embodiments, theattachment feature is a connector boss which is threaded for attachmentto a nut or other threaded connector. In some embodiments, theattachment feature is a tab, a threaded hole, or other suitable featurefor connecting to an electrical contact. However, in certainembodiments, the attachment feature can be configured for interferencefit, snap fit, friction fit, or other method of fitting with anelectrical contact. In certain embodiments, filter 700 includes a drainfitting 718 and drain plug (not shown). When the drain fitting 718and/or drain plug is a conductive material, one or both of thesecomponents may be connected to ground to provide ESD mitigation. FIG. 7aalso illustrates an optional retainer clamp that includes clampingelements 721, 722 and 723.

FIG. 7b illustrates an embodiment of an end cap 704 that includes aconductive polymer portion 730 and a natural polymer portion 732.

Co-extrusion Process

Tubing segments having conductive polymer stripes set out in thisdisclosure may be made using a variety of co-extrusion process. Forexample, the tubing segment 800 a illustrated in FIG. 8a includesconductive stripes 802 a and 804 a on the exterior or outside diameterof the tubing segment and conductive stripes 806 a on the interior orinside diameter of the tubing segment. In another embodiment, FIG. 8billustrates tubing segment 800 b having conductive stipes 802 b on theinterior of the tubing segment that are spiral stripes that extend alongthe axially length of the tubing segment. In another embodiment, FIG. 8cillustrates tubing segment 800 c having conductive stipes 802 c and 804c on both the exterior and interior of the tubing segment that arespiral stripes that extend along the axially along the length of thetubing segment. In still another embodiment, FIG. 8d illustrates tubingsegment 800 d having conductive stipes 802 d on the exterior of thetubing segment that are spiral stripes that extend along the axiallyalong the length of the tubing segment.

FIG. 9 is a digital image of a tubing segment 900 that includes eightinterior stripes, the black stripes in the image, on the interior of thetubing segment. This digital image shows the interior stripes are bondedto and uniform the other portion to the tubing segment. FIG. 10 is adigital image of an extrusion apparatus that provides one or more tubingsegments set out in the disclosure. FIG. 10 shows a non-conductiveextruded polymer (PFA) feed 1000 and a conductive extruded polymer(PFA/carbon black polymer) feed 1010 that are fed in a perpendicularmanner to a tool 1020 that extrude stripes 1030 on the inner diameter ofthe tubing segment 1050 as well as on both the inner and outer diametersof the tubing segment. Those skilled in the art would readily determinethe specific extrusion parameters that would provide the tubing segmenthaving conductive stripes that are bonded to and uniform with thenon-conductive portions of the tubing segment.

Example 1 Static Generation Test

This example measured the amount of static electricity generated byflowing deionized water the tubing segments that included the conductiveand non-conductive materials set out in Table 1, below. The measurementof static electricity was made using known methods for collecting andmeasuring generated charge in a Faraday cup.

FIG. 11 is a digital image that shows Faraday cup apparatus 1100 used inthis example. Briefly, deionized water 1110 is passed through anoperative element 1130 and grounded tubing segment 1120 and thencollected in a Faraday cup. The Faraday cup 1150 included a cover thatis not show in the image when the data was collected for this example.Exemplary data provided by the imaged data is set out in FIGS. 12-16,below.

FIGS. 12-13 graphically illustrate the difference in static chargegeneration between a PFA tubing segment and a stainless steel (SS)tubing segment having the same diameter under the same flow conditions.The PFA tubing segment generated substantially more static charge (about1600 nC) compared to the static charge generated by the SS tubingsegment (about 80 nC).

FIGS. 14-15 graphically illustrate the difference in static chargegeneration between a PFA/inner and outer diameter stripes tubing segmentand a PFA/inner diameter stripes tubing segment having the same diameterunder the same flow conditions. PFA/inner and outer diameter stripestubing segment generated less static charge (about 43 nC) compared tothe static charge generated by the PFA/inner diameter stripes tubingsegment (about 115 nC).

Table 1 summarizes the measured amount of static electricity generatedby various tubing segments tested in this example. These results arealso graphically displayed in FIG. 16.

TABLE 1 Charge in Range of Measured Resistance of cup at voltage Chargein lowest resistance material conclusion 1 cm from cup after DI water incontact with fluid or Cross of test outside of grounding Resistivitypresent on elsewhere Material Section (nC) tube. (V) (nC) (M-ohm) (ohm)1 Stainless Solid 14 25-175 3750 15.0 Steel stainless steel 2 CNT PFASolid 25 20 4000 17.5 1.2 × 10{circumflex over ( )}4-6.7 × 10{circumflexover ( )}5 conductive material 3 Entegris Conductive 45 10-35  4000 15.92.5-4.3 × 10{circumflex over ( )}4 striper ID stripes ID and OD and OD 4Nichias Conductive 75 0-40 4000 17.0 2.5-4.3 × 10{circumflex over ( )}4I-Beam I-beam ID to OD 5 Entegris Conductive 140 75-200 4000 16.72.5-4.3 × 10{circumflex over ( )}4 stripes ID Stripes ID only 6 PurelineConductive 1800 100 4000 16.0 2.5 × 10{circumflex over ( )}4-2 ×10{circumflex over ( )}5 Stripes OD only 7 PFA Solid PFA 3000 500-35004000 17.0 8 CP PFA, Solid 3000 −250 to 250 4000 17.8 2.7-2.9 ×10{circumflex over ( )}12 Entegris conductive 160 material material

The descriptions of the various embodiments of the present disclosurehave been presented for purposes of illustration, but are not intendedto be exhaustive or limited to the embodiments disclosed. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the describedembodiments. The terminology used herein was chosen to explain theprinciples of the embodiments, the practical application or technicalimprovement over technologies found in the marketplace, or to enableothers of ordinary skill in the art to understand the embodimentsdisclosed herein.

What is claimed is: 1-15. (canceled)
 16. An operative component forreducing charge accumulation, the operative component comprising: afluid passageway connecting an entrance of the fluid passageway to anexit of the fluid passageway; a conductive polymer comprising a portionof a wall of the fluid passageway; and an attachment feature thatconductively connects the conductive polymer of the respective operativecomponent to ground.
 17. The operative component of claim 16, whereinthe operative component comprises a valve, a straight connector, aT-connector, an elbow connector, a multi-connector manifold, a filter, aheat exchanger, or a sensor.
 18. The operative component of claim 16,wherein the operative component is a valve comprising a body portionhaving a fluid passageway valve to adjust flow through a fluidpassageway.
 19. The operative component of claim 16, wherein theoperative component is a filter comprising a body portion having ahousing with the fluid passageway, a filter element and two conductiveend caps with tubing connector fittings and conductive fitting nuts toconductively connect tubing segments connected to the filter, whereinthe body portion has conductive exterior stripes to conductively connectthe end caps.
 20. The operative component of claim 16, wherein theoperative component comprises a filter having a conductive sleeveconductively connecting two conductive end caps to the exterior of thebody portion.
 21. The operative component of claim 16, wherein theoperative component is a filter comprising a body portion having ahousing with the fluid passageway, a filter element, and a singleconductive end cap with tubing connector fittings and conductive fittingnuts to conductively connect tubing segments connected to the filter.22. The operative component of claim 16, wherein the operative componentis a filter.
 23. The operative component of claim 16, wherein theoperative component is configured to conductively connect to a secondoperative component.
 24. A tubing segment to reduce charge accumulation,the tubing segment comprising: a non-conductive polymer portion defininga fluid passageway; and an interior conductive stripe of conductivefluoropolymer extending axially to ends of the respective tubingsegment, the interior conductive stripe comprising a portion of a wallof the fluid passageway.
 25. The tubing segment of claim 24, wherein theinterior stripe of conductive fluoropolymer comprises a conductivefiller comprising carbon.
 26. The tubing segment of claim 25, whereinthe carbon comprises carbon black.
 27. The tubing segment of claim 24,wherein the fluoropolymer comprises a perfluoroalkoxy alkane polymer(PFA).
 28. The tubing segment of claim 24, wherein the fluoropolymercomprises ethylene tetrafluoroethylene polymer (ETFE).
 29. The tubingsegment of claim 24, wherein the fluoropolymer comprises at least onepolymer selected from a group consisting of ethylene tetrafluoroethylenepolymer (ETFE), ethylene, tetrafluoroethylene and hexafluoropropylenepolymer (EFEP), fluorinated ethylene propylene polymer (FEP), andtetrafluoroethylene polymer (PTFE).
 30. The tubing segment of claim 24,wherein the tubing segment comprises a plurality of exits.
 31. Thetubing segment of claim 24, wherein the tubing segment comprises aplurality of entrances.
 32. The tubing segment of claim 24, wherein thetubing segment comprises a plurality of interior conductive stripes ofconductive fluoropolymer extending axially to ends of the respectivetubing segment.
 33. The tubing segment of claim 32, wherein theplurality of interior conductive stripes of conductive fluoropolymercomprises four stripes.
 34. The tubing segment of claim 32, wherein theplurality of interior conductive stripes of conductive fluoropolymercomprises eight stripes.
 35. The tubing segment of claim 24, wherein theinterior conductive stripe of conductive fluoropolymer forms a spiral onthe wall of the fluid passageway.